Old Web
English
Sign In
Acemap
>
authorDetail
>
Rui Kihara
Rui Kihara
Waseda University
Thin film
Ion
Crystal
Electromechanical coupling coefficient
Sputtering
1
Papers
2
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Effect of negative ions generation from sputtering target on crystalline orientation and k t 2 of ScAlN thin films
2019
IUS | Internaltional Ultrasonics Symposium
Rui Kihara
Shinji Takayanagi
Takahiko Yanagitani
Show All
Source
Cite
Save
Citations (2)
1