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takuzi kitani
takuzi kitani
Composite material
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Materials science
Ceramic materials
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806 パッチ型LPCVD装置を用いたシリコンウエハ薄膜形成に関する影響因子解析(G06-2 熱物性・加工,G06 熱工学)
2005
takuzi kitani
kazusige kikuta
takemi kin kyuu
takao hisinuma
kazuhiro jou man
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各種薄膜付きシリコンウエハの温度変化による放射熱物性計測に関する検討(オーガナイズドセッション5 熱物性とその計測法)
2004
takuzi kitani
éå² ä½ã æ¨
kazusige kikuta
takemi kin kyuu
kou otto hisinuma
hidehisa hongou
syuuhei nisi dou
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