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Chih-I Wei
Chih-I Wei
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Extreme ultraviolet lithography
Optics
Materials science
Wafer
Computational lithography
2
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2024
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Better prediction on patterning failure mode with hotspot aware OPC modeling
2021
Chih-I Wei
Stewart Wu
Yunfei Deng
Gurdaman Khaira
Ir Kusnadi
Germain Fenger
Seul Ki Kang
Yosuke Okamoto
Kotaro Maruyama
Yuichiro Yamazaki
Sayantan Das
Sandip Halder
Werner Gillijns
Gian Lorusso
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Exploring alternative EUV mask absorber for iN5 self-aligned block and contact layers
2019
Rajiv Sejpal
Vicky Philipsen
Ana Armeanu
Chih-I Wei
Werner Gillijns
Neal V. Lafferty
Germain Fenger
Eric Hendrickx
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