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Germain Fenger
Germain Fenger
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Computer science
Materials science
Optical proximity correction
Lithography
Extreme ultraviolet lithography
9
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2024
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Contour based process characterization, modeling and control for semiconductor manufacturing
2021
Kan Zhou
Xin Guo
Wenzhan Zhou
Qijian Wan
Chunshan Du
Wenming Wu
Ao Chen
Recoo Zhang
Germain Fenger
Seshadri Rampoori
Bhamidipati Samir
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Unsupervised machine learning based SEM image denoising for robust contour detection
2021
Bappaditya Dey
Stewart Wu
Sayantan Das
Kasem Khalil
Sandip Halder
Philippe Leray
Samir Bhamidipati
Kiarash Ahi
Mark Pereira
Germain Fenger
Magdy Bayoumi
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SALELE process from theory to fabrication
2019
Youssef Drissi
Werner Gillijns
Jae Uk Lee
Ryan Ryoung han Kim
Ahmed Hamed Fatehy
Rehab K. Ali
Rajiv Sejpal
Germain Fenger
James Word
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