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Craig S. Alford
Craig S. Alford
Sputtering
Chemical vapor deposition
Sputter deposition
Thin film
Surface finishing
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Surface-defect formation in graphite targets during magnetron sputtering
1990
Journal of Vacuum Science and Technology
C W Chen
D. M. Makowiecki
Craig S. Alford
Mark A. McKernan
P. B. Ramsey
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Citations (4)
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