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R.W. Murto
R.W. Murto
Dielectric
Electronic engineering
CMOS
Materials science
Electron
2
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17
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Charges in HFO2 ALD gate dielectrics
2003
G. Bersuker
P. Zeitzoff
George A. Brown
Y. Kim
A. Hou
C. Lim
Chadwin D. Young
P Lysaght
M. Gardner
R.W. Murto
Howard R. Huff
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