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Phil Stopford
Phil Stopford
Synopsys
Optoelectronics
Photoresist
Materials science
Resist
Chemical-mechanical planarization
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Simulation of photoresist defect transfer through subsequent patterning processes
2020
Dominik Metzler
Mohamed Oulmane
Sagarika Mukesh
Phil Stopford
Karthik Yogendra
Lawrence S. Melvin
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