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P.F.H.M. van der Meulen

Eindhoven University of Technology

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The EXTRION 220 parallel scan magnet

1991 Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
- R.E. Kaim
- P.F.H.M. van der Meulen
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Energy contamination of P2+ ion beams on the Varian, EXTRION 220 medium current implanter

1991 Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
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Channeling implantation of B and P in silicon

1991 Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
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Simultaneous energy and angle resolved ion scattering spectroscopy

1988 Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
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