Simultaneous energy and angle resolved ion scattering spectroscopy

Abstract Low energy ion scattering (LEIS) is a useful technique for compositional and structural analysis of the outermost atomic layer of a solid. With our new EARISS-apparatus damage is strongly reduced. A 2-dimensional detector having a resolution of 1% in azimuth and radius is used. Up to 38 × 10 4 counts/s have been processed and stored.