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Vincent Ah-Leung
Vincent Ah-Leung
Materials science
Humanities
Microplasma
Atmospheric pressure
Reactive-ion etching
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Développement de procédés de gravure des espaceurs en nitrure de silicium pour les technologies sub-10nm
2020
Vincent Ah-Leung
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Near Atmospheric Pressure Etching of Silicon by Microplasma
2015
Valentin Felix
Vincent Ah-Leung
Judith Golda
Philippe Lefaucheux
Olivier Aubry
Thomas Tillocher
V Schulz-von der Gathen
Lawrence Overzet
Remi Dussart
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