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Near Atmospheric Pressure Etching of Silicon by Microplasma
Near Atmospheric Pressure Etching of Silicon by Microplasma
2015
Valentin Felix
Vincent Ah-Leung
Judith Golda
Philippe Lefaucheux
Olivier Aubry
Thomas Tillocher
V Schulz-von der Gathen
Lawrence Overzet
Remi Dussart
Keywords:
Microplasma
Atmospheric pressure
Reactive-ion etching
Etching
Analytical chemistry
Materials science
Silicon
Optoelectronics
Correction
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