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Grant Shoji
Grant Shoji
Composite material
Embossing
Process control
Materials science
Mechanical engineering
2
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Advanced In-Line Monitoring BrightField Inspection Tool for E-Test Correlation and Yield Analysis on 45nm Test Chips
2010
CSTIC | China Semiconductor Technology International Conference
YoungHun Kwon
HakY Yoon
Ho-Seong Kang
Ki-ho Kim
Minho Kim
YoungSun Oh
JunWoo Lee
Vikram Gunda
HeungSoo Choi
Grant Shoji
Keebum Jung
HyeongJu Choi
Jongpil Kim
Vijay Ramani
Satya Kurada
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Process Variability in Micro-Embossing
2005
David E. Hardt
Bala Ganesan
Matthew Dirckx
Grant Shoji
Kunal Thaker
Wang Qi
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