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Advanced In-Line Monitoring BrightField Inspection Tool for E-Test Correlation and Yield Analysis on 45nm Test Chips
Advanced In-Line Monitoring BrightField Inspection Tool for E-Test Correlation and Yield Analysis on 45nm Test Chips
2010
YoungHun Kwon
HakY Yoon
Ho-Seong Kang
Ki-ho Kim
Minho Kim
YoungSun Oh
JunWoo Lee
Vikram Gunda
HeungSoo Choi
Grant Shoji
Keebum Jung
HyeongJu Choi
Jongpil Kim
Vijay Ramani
Satya Kurada
Keywords:
Computer science
Analytical chemistry
Correlation
Pattern recognition
Artificial intelligence
Correction
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