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Gennadi Polisski
Gennadi Polisski
Applied Materials
Dielectric
Gate dielectric
Ellipsometry
Gate oxide
Depletion region
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In‐line 90 nm Technology Gate Oxide Nitrogen Monitoring With Non‐Contact Electrical Technique
2009
Nicolas Pic
Gennadi Polisski
Emmanuel Paire
Véronique Rizzo
Catherine Grosjean
Benjamin Bortolotti
John D’Amico
Nicolas Cabuil
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