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Young-Hye Son
Young-Hye Son
Chemistry
Nanoscopic scale
Tungsten film
Chemical engineering
Inorganic chemistry
3
Papers
12
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0
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Interfacial Chemical and Mechanical Reactions between Tungsten-Film and Nano-Scale Colloidal Zirconia Abrasives for Chemical-Mechanical-Planarization
2020
ECS Journal of Solid State Science and Technology
Eun-bin Seo
Jae-Young Bae
Sung In Kim
Han-Eol Choi
Young-Hye Son
Sangsu Yun
Jin-Hyung Park
Jea-Gun Park
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Citations (5)
Influence of Scavenger on Abrasive Stability Enhancement and Chemical and Mechanical Properties for Tungsten-Film Chemical- Mechanical-Planarization
2020
ECS Journal of Solid State Science and Technology
Eun-bin Seo
Jae-Young Bae
Sung In Kim
Han-Eol Choi
Pilsu Kim
Jong-Chan Lee
Young-Hye Son
Sang-Su Yun
Jin-Hyung Park
Jea-Gun Park
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Citations (4)
Surface-tensile-stress induced polishing-voids in cross-point phase-change-memory cells: corrosion mechanism and solution
2019
Semiconductor Science and Technology
Soo Bum Kim
Hao Cui
Jong-Young Cho
Eun-bin Seo
Sang Su Yoon
Young-Hye Son
Gi-Ppeum Jeong
Jae-Young Bae
Jin-Hyung Park
Jea-Gun Park
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Citations (3)
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