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Noriko Iida nee Sakurai
Noriko Iida nee Sakurai
Toshiba
Materials science
Lithography
Optoelectronics
Nanoimprint lithography
Multiple patterning
3
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2
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Resist pattern inspection for defect reduction in sub-15 nm templates
2020
Takeharu Motokawa
Machiko Suenaga
Kazuki Hagihara
Noriko Iida nee Sakurai
Ryu Komatsu
Hideaki Sakurai
Shingo Kanamitsu
Keisuke Tsuda
Tetsuo Harada
Takeo Watanabe
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Template development for sub15nm nanoimprint lithography
2020
Ryota Seki
Akihiko Ando
Takeharu Motokawa
Machiko Suenaga
Noriko Iida nee Sakurai
Ryu Komatsu
Masato Naka
Rikiya Taniguchi
Syuichi Taniguchi
Kazuki Hagihara
Masato Saito
Hideaki Sakurai
Ryoji Yoshikawa
Eiji Yamanaka
Shingo Kanamitsu
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Process capability of etched multilayer EUV mask
2015
Kosuke Takai
Noriko Iida nee Sakurai
Takashi Kamo
Yasutaka Morikawa
Naoya Hayashi
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