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Mitsuo Hiroyama
Mitsuo Hiroyama
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Metrology
Photomask
Optics
Detector
Accuracy and precision
3
Papers
1
Citations
0
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Evaluation of 3D metrology potential using a multiple detector CDSEM
2012
Hidemitsu Hakii
Isao Yonekura
Yasushi Nishiyama
Keishi Tanaka
Kenji Komoto
Tsutomu Murakawa
Mitsuo Hiroyama
Soichi Shida
Masayuki Kuribara
Toshimichi Iwai
Jun Matsumoto
Takayuki Nakamura
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Addressing 3D metrology challenges by using a multiple detector CDSEM
2011
Mitsuo Hiroyama
Tsutomu Murakawa
Masayuki Kuribara
Toshimichi Iwai
Minoru Soma
Ikuo Iko
Masahiro Seyama
Jun Matsumoto
Takayuki Nakamura
Hidemitsu Hakii
Isao Yonekura
Masashi Kawashita
Yasushi Nishiyama
Keishi Tanaka
Kenji Komoto
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A study of the limited area scanning system in the mask CD-SEM
2008
Toshi Iwai
Soichi Shida
Mitsuo Hiroyama
Takayuki Nakamura
Hisaya Sakaguchi
Hiroki Ueno
Masaru Higuchi
Tatsuya Aihara
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