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Kinji Harada
Kinji Harada
Yokogawa Electric
Electronic engineering
Resonator
Diaphragm (structural system)
Pressure sensor
Silicon
5
Papers
223
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Various applications of resonant pressure sensor chip based on 3-D micromachining
1999
Sensors and Actuators A-physical
Kinji Harada
Kyoichi Ikeda
Hideki Kuwayama
Hidekazu Murayama
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Citations (41)
Intelligent sensors in process instrumentation
1996
Kinji Harada
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Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm
1990
Sensors and Actuators A-physical
Kyoichi Ikeda
Hideki Kuwayama
Takashi Kobayashi
Teysuya Watanabe
Tadashi Nishikawa
Takashi Yoshida
Kinji Harada
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Citations (71)
Silicon pressure sensor integrates resonant strain gauge on diaphragm
1990
Sensors and Actuators A-physical
Kyoichi Ikeda
Hideki Kuwayama
Takashi Kobayashi
Tetsuya Watanabe
Tadashi Nishikawa
Takashi Yoshida
Kinji Harada
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Citations (106)
PRECISION TRANSDUCERS USING MECHANICAL RESONATORS.
1984
Kinji Harada
Kyoichi Ikeda
Toshitsugu Ueda
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Citations (5)
1