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Hideki Kuwayama
Hideki Kuwayama
Yokogawa Electric
Pressure sensor
Electronic engineering
Diaphragm (structural system)
Silicon
Analytical chemistry
4
Papers
218
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Various applications of resonant pressure sensor chip based on 3-D micromachining
1999
Sensors and Actuators A-physical
Kinji Harada
Kyoichi Ikeda
Hideki Kuwayama
Hidekazu Murayama
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Citations (41)
Pressure sensor with vibrating element.
1991
Kyoichi Ikeda
Tetsuya Watanabe
Takahiro Kudo
Akio Fujita
Hideo Tsukamoto
Nobuaki Kohno
Hideki Kuwayama
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Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm
1990
Sensors and Actuators A-physical
Kyoichi Ikeda
Hideki Kuwayama
Takashi Kobayashi
Teysuya Watanabe
Tadashi Nishikawa
Takashi Yoshida
Kinji Harada
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Citations (71)
Silicon pressure sensor integrates resonant strain gauge on diaphragm
1990
Sensors and Actuators A-physical
Kyoichi Ikeda
Hideki Kuwayama
Takashi Kobayashi
Tetsuya Watanabe
Tadashi Nishikawa
Takashi Yoshida
Kinji Harada
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Citations (106)
1