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Yasutsugu Usami
Yasutsugu Usami
Hitachi
Scanning electron microscope
Photoresist
Optics
Materials science
Miniaturization
3
Papers
4
Citations
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Complementary use of scatterometry and SEM for photoresist profile and CD determination
2002
Storage and Retrieval for Image and Video Databases
Yuya Toyoshima
Isao Kawata
Yasutsugu Usami
Yasuhiro Mitsui
Apo Sezginer
Eric Maiken
Kin-Chung Chan
Kenneth W. Johnson
Dean Yonenaga
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Citations (1)
Complementary use of scatterometry and SEM for photoresist profile and CD determination
2002
Yuya Toyoshima
Isao Kawata
Yasutsugu Usami
Yasuhiro Mitsui
Apo Sezginer
Eric Maiken
Kin-Chung Chan
Kenneth W. Johnson
Dean Yonenaga
Show All
Source
Cite
Save
Citations (3)
1