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Laura M. Matz

Air Products & Chemicals

7

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29

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Composition de nettoyage de photorésine utilisée en photolithographie et procédé de traitement de substrat avec celle-ci

2016
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Silicon precursor development for advanced dielectric barriers for VLSI technology

2012 Microelectronic Engineering
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Procédés de formation de couches minces de titanate de strontium

2010
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Porous low k structural design to meet next generation interconnect needs

2010 IITC | International Interconnect Technology Conference
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Impact of CMP Polish and pCMP Cleaning on Adhesion of SiCN Capping Layer on PECVD-Derived Porous OSG and Copper

2009 Solid State Phenomena
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