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Edward B. Harris
Edward B. Harris
Alcatel-Lucent
Electronic engineering
Materials science
CMOS
Transistor
Optoelectronics
4
Papers
13
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Single mask metal-insulator-metal (MIM) capacitor with copper damascene metallization for sub-0.18 /spl mu/m mixed mode signal and system-on-a-chip (SoC) applications
2000
IITC | International Interconnect Technology Conference
Ruichen Liu
Cheng-Yih Lin
Edward B. Harris
Sailesh Mansinh Merchant
S.W. Downey
Gary Robert Weber
N.A. Ciampa
Wai Tai
W.Y.C. Lai
M.D. Morris
John Eric Bower
J.F. Miner
J. Frackoviak
W. M. Mansfield
D. Barr
R. C. Keller
Chong-Ping Chang
Chien-Shing Pai
S.N. Rogers
Richard W. Gregor
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Effects of high-density plasma processing on MOSFET matching, noise, and hot carrier reliability
1999
Sidhartha Sen
Edward B. Harris
Richard William Gregor
Samuel Martin
Mahjoub A. Abdelgadir
Rafael N. Barba
Sundar Chetlur
Kurt G. Steiner
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Influence of passivation anneal position on metal coverage dependent mismatch and hot carrier reliability
1999
IPFA | International Symposium on the Physical and Failure Analysis of Integrated Circuits
S. Chetlur
Sidhartha Sen
Edward B. Harris
Hem M. Vaidya
Isik C. Kizilyalli
R. Gregor
B. Harding
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Manufacturing multilevel metal CMOS with deuterium anneals for improved hot-carrier reliablility
1998
Isik C. Kizilyalli
G. C. Abeln
Zhi Chen
Gary Robert Weber
F. Register
Edward B. Harris
Sundar Chetlur
Gregg Higashi
M. Schofieled
Sidhartha Sen
B. Kotzias
Pradip Kumar Roy
Joseph W. Lyding
K. Hess
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