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Richard William Gregor
Richard William Gregor
Alcatel-Lucent
Plasma etching
Optoelectronics
Electrical engineering
Materials science
Chemical vapor deposition
3
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9
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0
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Inductance or conductive path with low loss in an integrated circuit
1999
V.D. Archer
Nathan Scotch Plains Belk
Michael Carroll
William Thomas Cochran
Donald C. Dennis
M. Frei
David Clayton Goldthorp
Richard William Gregor
Wen Allentown Lin
Shahriar Moinian
W.J. Nagy
K.K. Ng
M.R. Pinto
David Arthur Rich
Ya-Hong Beverly Hills Xie
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Effects of high-density plasma processing on MOSFET matching, noise, and hot carrier reliability
1999
Sidhartha Sen
Edward B. Harris
Richard William Gregor
Samuel Martin
Mahjoub A. Abdelgadir
Rafael N. Barba
Sundar Chetlur
Kurt G. Steiner
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Charging damage in metal-oxide-metal capacitors
1998
PPID | International Symposium on Plasma Process-Induced Damage
E.B. Harris
Richard William Gregor
D.C. Dennis
T.T. Lai
Sidhartha Sen
Y.F. Yan
T. Esry
M. Pita
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Citations (9)
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