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teturou ogata
teturou ogata
Artificial intelligence
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Plasma
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Commande de champ magnétique pour la distribution d'une épaisseur de film uniforme dans un dispositif de pulvérisation
2009
eisaku watanabe
teturou ogata
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Magnetic field control of the sputtering apparatus for uniform thickness distribution
2009
teturou ogata
eisaku watanabe
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Low-k材料とエッチング技術 (特集 半導体製造工程を変革する新プロセス技術) -- (最新トピックス1 新プロセス/新材料の導入)
2004
keizou kinosita
teturou ogata
hideki takahasi
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A New Plasma-Enhanced Co-Polymerization (PCP) Technology for Reinforcing Mechanical Properties of Organic Silica Low-k/Cu Interconnects on 300 mm Wafers(低誘電率層間膜,配線材料及び一般)
2004
SDM | SIAM International Conference on Data Mining
jun kawara
akinori nakano
nobutaka kunimi
keizou kinosita
yosihiro hayasi
akira isikawa
yutaka seino
teturou ogata
hideki takahasi
yuzuru sonoda
yuusin yosino
takasi gotou
syouzou takada
rie itikawa
hidenori miyosi
hisanori matuo
saburou adati
kou maro yosikawa
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自己集合体化技術を用いた超低誘電率多孔質シリカ膜(低誘電率層間膜,配線材料及び一般)
2004
SDM | SIAM International Conference on Data Mining
yosiaki oku
kazuhiro yamada
takasi gotou
yutaka seino
akira isikawa
teturou ogata
kazuo takamura
sen nen fuzii
nobuhiro sin
rie itikawa
yuusin yosino
tie negoro
akinori nakano
yuzuru sonoda
syouzou takada
hidenori miyosi
syunsuke ooike
hirofumi tanaka
hisanori matuo
keizou kinosita
kou maro yosikawa
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