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自己集合体化技術を用いた超低誘電率多孔質シリカ膜(低誘電率層間膜,配線材料及び一般)
自己集合体化技術を用いた超低誘電率多孔質シリカ膜(低誘電率層間膜,配線材料及び一般)
2004
yosiaki oku
kazuhiro yamada
takasi gotou
yutaka seino
akira isikawa
teturou ogata
kazuo takamura
sen nen fuzii
nobuhiro sin
rie itikawa
yuusin yosino
tie negoro
akinori nakano
yuzuru sonoda
syouzou takada
hidenori miyosi
syunsuke ooike
hirofumi tanaka
hisanori matuo
keizou kinosita
kou maro yosikawa
Keywords:
Artificial intelligence
Machine learning
Computer science
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