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T. Matsushima
T. Matsushima
Panasonic Electric Works
Thin film
Sputtering
Piezoelectricity
Single crystal
Analytical chemistry
4
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31
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High efficiency energy harvester of transferred epitaxial PZT films on stainless steel sheets
2010
MEMS | International Conference on Micro Electro Mechanical Systems
Isaku Kanno
K. Morimoto
Ryuji Yokokawa
Kiyotaka Wasa
Hidetoshi Kotera
Norihiro Yamauchi
J. Ogawa
T. Matsushima
Koichi Aizawa
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Citations (4)
High performance 4 GHz FBAR prepared by Pb(Mn,Nb)O 3 -Pb(Zr,Ti)O 3 sputtered thin films
2010
FCS | International Frequency Control Symposium
T. Matsushima
Norihiro Yamauchi
Takeo Shirai
Takaaki Yoshihara
Yoshiki Hayasaki
T. Ueda
Isaku Kanno
Kiyotaka Wasa
Hidetoshi Kotera
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Citations (2)
High coupling piezoelectric thin films of Pb"Zr,Ti…O3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators
2009
Applied Physics Letters
Norihiro Yamauchi
Takeo Shirai
Takaaki Yoshihara
Yoshiki Hayasaki
T. Ueda
T. Matsushima
Kiyotaka Wasa
Isaku Kanno
Hidetoshi Kotera
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Citations (25)
Microstructure and piezoelectric properties of PZT-based ternary perovskite Pb(Mn,Nb)O 3 -PZT thin films
2009
ISAF | International Symposium on Applications of Ferroelectrics
Kiyotaka Wasa
Norihiro Yamauchi
Takeo Shirai
T. Ueda
T. Matsushima
Ken Nishida
Tadashi Yamamoto
Isaku Kanno
Hidetoshi Kotera
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