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A. Dedkova
A. Dedkova
Nanostructure
Thin film
Nanotechnology
Plasma-enhanced chemical vapor deposition
Carbon film
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Study of growth kinetics of amorphous carbon nanopillars formed by PECVD
2014
D. G. Gromov
N. I. Borgardt
Ya. S. Grishina
A. Dedkova
E. P. Kirilenko
S. V. Dubkov
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