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A.N. Velaga
A.N. Velaga
Bell Labs
Analytical chemistry
CMOS
Boron
Scanning electron microscope
Chemical vapor deposition
3
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2
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A Manufacturable Embedded Fluorinated Si02 for Advanced 0.25 ym CMOS VLSl Multilevel Interconnect Applications.
1998
International Interconnect Technology Conference
C.S. Pai
A.N. Velaga
W.S. Lindenberger
K.P. Cheung
Frieder H. Baumann
C. P. Chang
C.T. Liu
R. Liu
Philip W. Diodato
J.I. Colonell
H. Vaidya
S. C. Vitkavage
J. T. Clemens
F. Tsubokura
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Effect of dopants on the thermal processing of salicided (titanium disilicided) CMOS structures
1993
Semiconductor Science and Technology
Sailesh Chittipeddi
M. J. Kelly
A.N. Velaga
V. C. Kannan
C. M. Dziuba
William Thomas Cochran
B Rambabu
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The flow characteristics of borophosphosilicate (TEOS based) glass
1991
VLSI-MIC | International IEEE VLSI Multilevel Interconnection Conference
Sailesh Chittipeddi
A.N. Velaga
A.K. Nanda
William Thomas Cochran
R.N. Graver
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