Old Web
English
Sign In
Acemap
>
authorDetail
>
Motoki Kadowaki
Motoki Kadowaki
Toshiba
Optics
Cathode ray
Extreme ultraviolet
Mask inspection
Engineering
4
Papers
31
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Capability of model EBEYE M for EUV mask production
2012
Masato Naka
Shinji Yamaguchi
Motoki Kadowaki
Toru Koike
Takashi Hirano
Masamitsu Itoh
Yuichiro Yamazaki
Kenji Terao
Masahiro Hatakeyama
Kenji Watanabe
Hiroshi Sobukawa
Takeshi Murakami
Kiwamu Tsukamoto
Takehide Hayashi
Ryo Tajima
Norio Kimura
Naoya Hayashi
Show All
Source
Cite
Save
Citations (2)
Performance of EBeyeM for EUV Mask Inspection
2011
Shinji Yamaguchi
Masato Naka
Takashi Hirano
Masamitsu Itoh
Motoki Kadowaki
Tooru Koike
Yuichiro Yamazaki
Kenji Terao
Masahiro Hatakeyama
Kenji Watanabe
Hiroshi Sobukawa
Takeshi Murakami
Tsutomu Karimata
Kiwamu Tsukamoto
Takehide Hayashi
Ryo Tajima
Norio Kimura
Naoya Hayashi
Show All
Source
Cite
Save
Citations (18)
Systematic Measurement Uncertainty of Critical Dimension Scanning Electron Microscope
2010
Japanese Journal of Applied Physics
Hideaki Abe
Motoki Kadowaki
Akira Hamaguchi
Takahiro Ikeda
Yuichiro Yamazaki
Show All
Source
Cite
Save
Citations (1)
Development of EB inspection system EBeyeM for EUV mask
2010
Takashi Hirano
Shinji Yamaguchi
Masato Naka
Masamitsu Itoh
Motoki Kadowaki
Tooru Koike
Yuuichiro Yamazaki
Kenji Terao
Masahiro Hatakeyama
Hiroshi Sobukawa
Takeshi Murakami
Kiwamu Tsukamoto
Takehide Hayashi
Kenji Watanabe
Norio Kimura
Naoya Hayashi
Show All
Source
Cite
Save
Citations (10)
1