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Ryo Tajima
Ryo Tajima
Ebara Corporation
Mask inspection
Extreme ultraviolet
Engineering
Optics
Extreme ultraviolet lithography
3
Papers
21
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Capability of particle inspection on patterned EUV mask using model EBEYE M
2014
Masato Naka
Ryoji Yoshikawa
Shinji Yamaguchi
Takashi Hirano
Masamitsu Itoh
Kenji Terao
Masahiro Hatakeyama
Kenji Watanabe
Hiroshi Sobukawa
Takeshi Murakami
Kiwamu Tsukamoto
Takehide Hayashi
Ryo Tajima
Norio Kimura
Naoya Hayashi
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Capability of model EBEYE M for EUV mask production
2012
Masato Naka
Shinji Yamaguchi
Motoki Kadowaki
Toru Koike
Takashi Hirano
Masamitsu Itoh
Yuichiro Yamazaki
Kenji Terao
Masahiro Hatakeyama
Kenji Watanabe
Hiroshi Sobukawa
Takeshi Murakami
Kiwamu Tsukamoto
Takehide Hayashi
Ryo Tajima
Norio Kimura
Naoya Hayashi
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Performance of EBeyeM for EUV Mask Inspection
2011
Shinji Yamaguchi
Masato Naka
Takashi Hirano
Masamitsu Itoh
Motoki Kadowaki
Tooru Koike
Yuichiro Yamazaki
Kenji Terao
Masahiro Hatakeyama
Kenji Watanabe
Hiroshi Sobukawa
Takeshi Murakami
Tsutomu Karimata
Kiwamu Tsukamoto
Takehide Hayashi
Ryo Tajima
Norio Kimura
Naoya Hayashi
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Citations (18)
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