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Sergey P. Timoshenkov
Sergey P. Timoshenkov
Acoustics
Materials science
Accelerometer
Capacitive sensing
Gyroscope
5
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Thermomechanical Strength of Connections of Elements in Microelectronic Modules
2019
A.I. Pogalov
A. Yu. Titov
Sergey P. Timoshenkov
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Parameters of Sensitive Element of Capacitive Micromechanical Accelerometer with Sandwich Construction
2019
Ye Ko Ko Aung
Aung Thura
B. M. Simonov
Sergey P. Timoshenkov
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Investigation of the Initial Silicon-on-Sapphire Layer Formed by CVD Techniques
2019
Semiconductors
S.D. Fedotov
E M Sokolov
V.N. Statsenko
A. V. Romashkin
Sergey P. Timoshenkov
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Research of Micromechanical Ring Gyroscope
2019
Sergey P. Timoshenkov
Stepan Anchutin
V.E. Plekhanov
E. S. Kochurina
A.S. Musatkin
Alexey Timoshenkov
Lmd Ltd, Moscow, Russian Federation
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Research of Influence of Random Vibrations on MEMS Samples
2019
Aung Thura
B. M. Simonov
Sergey P. Timoshenkov
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