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Parameters of Sensitive Element of Capacitive Micromechanical Accelerometer with Sandwich Construction
Parameters of Sensitive Element of Capacitive Micromechanical Accelerometer with Sandwich Construction
2019
Ye Ko Ko Aung
Aung Thura
B. M. Simonov
Sergey P. Timoshenkov
Keywords:
Accelerometer
Capacitive sensing
Acoustics
Materials science
Correction
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