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Hirokazu Hosoda
Hirokazu Hosoda
Extreme ultraviolet lithography
light source
Semiconductor
Lithography
Optics
3
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2024
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The development progress of the high power LPP-EUV light source using a magnetic field
2021
Hirokazu Hosoda
Shinji Nagai
Tatsuya Yanagida
Yutaka Shiraishi
Yoshifumi Ueno
Kenichi Miyao
Hideyuki Hayashi
Yukio Watanabe
Tamotsu Abe
Hiroaki Nakarai
Hakaru Mizoguchi
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Update of >300W high power LPP-EUV source challenge for semiconductor HVM
2020
Hakaru Mizoguchi
Hiroaki Nakarai
Tamotsu Abe
Hiroshi Tanaka
Yukio Watanabe
Tsukasa Hori
Yutaka Shiraishi
Yoshifumi Ueno
Tatsuya Yanagida
Georg Soumagne
Tsuyoshi Yamada
Takashi Saitou
Hirokazu Hosoda
Hiroaki Tomuro
Shinji Nagai
Gouta Niimi
Takashi Suganuma
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Latest Result of Extreme Ultra-Violet (EUV) Light Source for Semiconductor Lithography
2016
The Japan Society of Applied Physics
Yuta Takashima
Tsukasa Hori
Yoshifumi Ueno
Tamotsu Abe
Takayuki Yabu
Katsuhiko Wakana
Yoshiaki Kato
Tsutomu Kashiwazaki
Osamu Fukuda
Takahisa Fujimaki
Yuichi Nishimura
Rei Takenaka
Toru Suzuki
Masahiko Andou
Hirokazu Hosoda
Koutaro Miyashita
Takayuki Osanai
Takashi Saitou
Hakaru Mizoguchi
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