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Michael P. Rodriguez
Michael P. Rodriguez
SEMATECH
Photoresist
Environmental chemistry
Analytical chemistry
Contamination
Resist
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Effects of airborne molecular contamination on 157-nm resists: AMC friend or foe?
2004
Jeff Meute
Georgia K. Rich
Karen L. Turnquest
Kim Dean
Shashikant Patel
Victoria L. Graffenberg
Michael P. Rodriguez
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