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Takashi Okagawa
Takashi Okagawa
Optics
Electron-beam lithography
Cell projection
Lithography
Physics
5
Papers
14
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Pellicle degradation and its effect on surrounding environment in ArF lithography
2000
Junji Miyazaki
Takashi Okagawa
Keisuke Nakazawa
Toshiro Itani
Shigeto Shigematsu
Hiroaki Nakagawa
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Influence of electron acceleration voltage in the cell-projection lithography system
2000
Microelectronic Engineering
Masatoshi Kotera
Kiyoshi Yamaguchi
M. Sakai
K. Naruse
Takashi Okagawa
Koji Matsuoka
Yoshinori Kojima
M. Yamabe
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Development of a Simulator for Cell-projection Type Electron Beam Lithography
1999
Shinku
Masatoshi Kotera
Kiyoshi Yamaguchi
Koji Matsuoka
Takashi Okagawa
Yoshinori Kojima
M. Yamabe
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Characteristic variation of exposure pattern in the cell-projection electron beam lithography
1999
MNC | International Microprocesses and Nanotechnology Conference
Masatoshi Kotera
Kiyoshi Yamaguchi
Takashi Okagawa
Koji Matsuoka
Yoshinori Kojima
M. Yamabe
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Influence of the mask-scattered electrons in the cell-projection lithography
1999
Journal of Vacuum Science & Technology B
Masatoshi Kotera
Kiyoshi Yamaguchi
Takashi Okagawa
Koji Matsuoka
Yoshinori Kojima
M. Yamabe
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Citations (7)
1