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Nagamani Nataraj
Nagamani Nataraj
Numerical aperture
Optics
Laser
Analytical chemistry
Immersion lithography
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Liquid immersion lens technology applied to laser voltage probing of 130 nm process technology devices
2002
Journal of Vacuum Science & Technology B
Nagamani Nataraj
Herve Deslandes
William Lo
Travis M. Eiles
Patrick Pardy
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