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George F. McLane
George F. McLane
Methane
Passivation
Reactive-ion etching
Annealing (metallurgy)
Hydrogen
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Magnetron Reactive Ion Etching of GaAs and AIGaAs in CH4/H2/Ar Plasmas.
1996
George F. McLane
P. Cooke
R. Moerkirk
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