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Silicon-Germanium Alloy
Silicon-Germanium Alloy
Electron-beam lithography
X-ray lithography
Dry etching
Photolithography
Ion beam lithography
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AIN as a Dry-Etch Durable Resist for Electron and Ion Beam Lithography
2016
Shigeru Shigetomi
Tesuo Ikari
Unhydrogenated Amorphous
Silicon-Germanium Alloy
Yoshiki Takano
Nobuyasu Kitaoka
Hajime Ozaki
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