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Chih-Chen Chang
Chih-Chen Chang
Industrial Technology Research Institute
Microwave
Nuclear magnetic resonance
Excited state
Plasma
Chemistry
3
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Simulations of electric field distributions by the susceptor-coupling effects for 2.45GHz microwave inside microwave chamber
2015
IPFA | International Symposium on the Physical and Failure Analysis of Integrated Circuits
Fu-Kuo Hsueh
Chih-Chen Chang
Kun-Ping Huang
Yao-Jen Lee
Wen-Fa Wu
Tien-Sheng Chao
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A microwave-excited plasma source of linear type, which uses a slotted rectangular waveguide as a plasma excitation
2010
Chih-Chen Chang
Chih-Yung Chen
Chien-Chih Chen
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Microwave-excited plasma processing apparatus using a toothed waveguide excited by plasma reactors linear microwave plasma source
2008
Chih-Chen Chang
Jung-Chen Chien
Jung-Chen Ho
Muh-Wang Liang
Chan-Hsing Lo
Tean-Mu Shen
Fu-Ching Tung
Ching-Huei Wu
Tung-Chuan Wu
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