Microwave-excited plasma processing apparatus using a toothed waveguide excited by plasma reactors linear microwave plasma source

The present invention relates to a microwave-excited plasma processing apparatus using a toothed excited by (ridged) waveguide plasma reactors linear microwave plasma source. The microwave-excited plasma processing apparatus (200) comprises a processing cavity (210), a toothed waveguide (220) and a partition board (230). The toothed waveguide (220) is disposed in the processing cavity (210) and includes a frame (222), a back part (224) and a line-shaped channel (226), wherein the line-shaped channel (226) (on the first side of the frame 222), and the back portion (224) extends (on the second side of the frame 222), and that the line-shaped channel (226) located opposite. The partition board (230) is arranged at the line-shaped channel (226). In addition, the toothed waveguide (220) is adapted for receiving a microwave that is transmitted through the line-shaped channel (226) for exciting a plasma for processing cavity (210).