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T. Takagi

Kyoto University

25

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Chapter 7B – IONIZED CLUSTER BEAM DEPOSITION

1989
- T. Takagi
- I. Yamada
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Citations (5)
Bombarding effects by ionized cluster beams

1988 Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
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Citations (14)
Ionized cluster beam (ICB) deposition and processes

1988 Pure and Applied Chemistry
- T. Takagi
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Current status of ionized-cluster beam technique: A low energy ion beam deposition

1987 Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
- Isao Yamada
- T. Takagi
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Citations (1)
Ionized Clusters: A Technique For Low Energy Ion Beam Deposition

1987 Optical Engineering
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Negative ion source (NIABNIS) and preparation of transparent carbon films by negative carbon ion beam deposition

1987 Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
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Citations (22)
Impregnated-electrode-type liquid metal ion source

1986 Vacuum
- Junzo Ishikawa
- T. Takagi
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Ionized Cluster Beam Technique for Thin Film Deposition

1986 European Physical Journal D
- T. Takagi
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Ionized cluster beam technique

1986 Vacuum
- T. Takagi
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The Formation and Kinetics of Ionized Cluster Beams

1986 European Physical Journal D
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Citations (27)