The Formation and Kinetics of Ionized Cluster Beams

The formation and kinetics of large vapourized-material cluster beams (large size metal clusters) are discussed. The clusters are formed by injecting the vapour of solid state materials into a high vacuum region through a nozzle of a heated crucible. The conditions under which metal clusters form are analysed using nucleation theory. Computer simulation by combining the nucleation and flow equations has also been made. The results show that the theory can be useful in predicting qualitative dependences of metal cluster formation on operation conditions. Several experimental results are also presented, which support the finding that a large size metal cluster is formed by homogeneous nucleation and growth. The advantageous characteristics of ionized cluster beam for thin film formation are also discussed.