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Robert Ronald Wilbarg

IBM

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Manufacture of vacuum microelectronic device

1993
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Chemically amplified negative-tone photoresist for sub-half-micron device and mask fabrication

1991
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Procédé pour former des structures en couche mince à l'aide de la technique lift-off

1978
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Verfahren zur Herstellung von Dünnfilmmustern unter Anwendung der Abhebetechnologie

1978
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