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Kazuhiro Murakami
Kazuhiro Murakami
Oxide
Materials science
Metallurgy
Electronic engineering
CMOS
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Chemical dry cleaning technology for reliable 65 nm CMOS contact to NiSi/sub x/
2005
IITC | International Interconnect Technology Conference
Makoto Honda
K. Tsutsumi
Hideaki Harakawa
A. Nomachi
Kazuhiro Murakami
K. Ooya
T. Kudou
Takahito Nagamatsu
Hirokazu Ezawa
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