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M. J. Shyu
M. J. Shyu
National Tsing Hua University
Sputtering
Sputter deposition
Surface roughness
Thin film
Electrode
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Effects of Sputter-Deposited LaNiO 3 Electrode on the Deposition and Properties of Ferroelectric Thin Films
1996
MRS Proceedings
Tai-Bor Wu
J.-M. Wu
C.-M. Wu
M. J. Shyu
M.S. Chen
J. S. Doing
C. C. Yang
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Citations (3)
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