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S. Lindsey

Vienna University of Technology

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Inverse modeling of FIB milling by dose profile optimization

2014 Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
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Sputtering of silicon at glancing incidence

2013 Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
- S. Lindsey
- G. Hobler
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