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hideaki fuku yo
hideaki fuku yo
Materials science
Metallurgy
Sputtering
Titanium
Mineralogy
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Sputtering titanium target
2011
sirou tukamoto
syuuzi makino
hideaki fuku yo
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Method for producing a sintered target and sintered body
2008
hideaki fuku yo
yahagi masataka
masataka yahagi
yamakosi yasuhiro
yasuhiro yamakosi
takahasi hideyuki
hideyuki takahasi
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スパッタリングターゲットの製造技術 (特集 電子材料の製造・評価技術)
2008
hideaki fuku yo
masataka yahagi
ryou suzuki
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High-purity aluminum or sputtering target made of an alloy thereof
1993
syun nagasawa
susumu sawada
hideaki fuku yo
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