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Hozumi Usui
Hozumi Usui
Materials science
Sulfuric acid
Nanotechnology
X-ray lithography
Photolithography
3
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5
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2024
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Development of refined cleaning technique focusing on an ecological viewpoint
2001
Koji Tange
Yoshikazu Nagamura
Kunihiro Hosono
Yuki Oomasa
Koichi Kido
Atsushi Hayashi
Yasutaka Kikuchi
Ichiro Imagawa
Yuuichi Matsuzawa
Hozumi Usui
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Verfahren und Vorrichtung zur Reinigung einer Fotomaske
1998
Yoshikazu Nagamura
Nobuyuki Yoshioka
Hozumi Usui
Koji Yamanaka
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