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T. Onoki
T. Onoki
Physics
Nuclear magnetic resonance
X-ray lithography
Electron-beam lithography
Electromagnetic shielding
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Evaluation on Shielding Factor of Active Magnetic Shielding for Electron Beam Lithography System
2008
Journal of The Magnetics Society of Japan
K. Yamazaki
T. Onoki
K. Kobayashi
K Muramatsu
Akira Haga
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