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David Chen
David Chen
KLA-Tencor
Surface roughness
Scattering
Wafer
Optics
Thin film
3
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1
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0
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Procédé et système pour le balayage adaptatif d'un échantillon durant une inspection par faisceau électronique
2014
Gary Fan
David Chen
Vivekanand Kini
Hong Xiao
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Laser Scattering Microhaze Correlation with Polysilicon Surface Roughness and Impact on Electrical Performance
2006
ISSM | International Symposium on Semiconductor Manufacturing
David Chen
Andy Steinbach
Matt Yeh
Chien-Hao Chen
Shih-Chang Chen
Mong-Song Liang
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Surface Watch Generating High-Speed, Full-Wafer Maps of Surface Microroughness
2006
Andy Steinbach
Alexander Belyaev
Becky Pinto
David Chen
Sanda Radovanovic
Gordana Neskovic
Hamlyn Yeh
Albert Wang
Jien Cao
Juergen Reich
Dan Kavaldjiev
Prasanna Dighe
Rahul Bammi
Louis Vintro
David Bloom
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